Investigation of Focused Ion and Electron Beam Platinum Carbon Nano-Tips with Transmission Electron Microscopy for Quantum Tunneling Vacuum Gap Applications

To realize quantum tunneling applications with movable electrodes, sharp tips radii down to several tens of nanometers are necessary. The use a focused ion beam (FIB) and electron (FEB) gas injection system (GIS) allows the integration geometries in nanoscale directly into micro nano systems. However, implementation effect clearly depends on material. In this work, metal-organic precursor is used. investigation prepared electrodes enables an insight FIB/FEB parameters for realization applications. For purpose, high-resolution transmission microscopy (HRTEM) analysis performed. results show dependence material nanostructure regarding platinum (Pt) grain size distribution amorphous carbon matrix from used FIB currents. polysilicon (PolySi) measuring current signal by approaching significant differences results. Moreover, approach FEB shows non-contact behavior even when squeezed together. contact size, proportion platinum, amount microstructure, especially at edge area tips. This study between tips, particularly tips: higher current, greater content, finer probability